THERMAL TREATMENT DEVICE,申请号JP19970369494-传众专利搜索

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发明名称	THERMAL TREATMENT DEVICE
摘要
申请公布号	JPH11195648(A)	申请公布日期	1999.07.21
申请号	JP19970369494	申请日期	1997.12.27
申请人	TOKYO ELECTRON LTD	发明人	SAITO YUKIMASA
分类号	H01L21/31;C23C16/34;C23C16/40;C23C16/44;H01L21/318;(IPC1-7):H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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