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发明名称
HEAT TREATMENT APPARATUS AND OPERATING METHOD THEREOF
摘要
申请公布号
KR100210623(B1)
申请公布日期
1999.07.15
申请号
KR19940016333
申请日期
1994.07.07
申请人
TOKYO ELETRON TOHOKU LTD;TOKYO ELECTRON LIMITED
发明人
YAMAKA, KENICHI;KOBAYASHI, DOSHIKI
分类号
C23C16/44;C23C16/455;C30B25/14;(IPC1-7):H01L21/324
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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