Piezoelektrisches/elektrostriktives Dünnfilmelement mit convexem Membran und Verfahren zu seiner Herstellung

摘要

A piezoelectric/electrostrictive film element which includes a ceramic substrate (2, 22) having at least one window (6, 36) and a diaphragm portion (10) for closing each window, and a film-like piezoelectric/electrostrictive unit (18, 24) formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes outwards, in a direction away from the corresponding window. The piezoelectric/electrostrictive unit includes a lower electrode (12, 40), a piezoelectric/electrostrictive layer (14, 42) and an upper electrode (16, 44), which are formed in lamination in the order of description on a convex outer surface of the diaphragm portion by a film-forming method. Also disclosed is a method of producing the piezoelectric/electrostrictive film element as described above.