发明名称 |
Microlens frames for laser diode arrays |
摘要 |
Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.
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申请公布号 |
US5923481(A) |
申请公布日期 |
1999.07.13 |
申请号 |
US19960753656 |
申请日期 |
1996.11.27 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
SKIDMORE, JAY A.;FREITAS, BARRY L. |
分类号 |
G02B3/00;G02B6/36;G02B7/02;H01S5/00;H01S5/40;(IPC1-7):G02B7/02 |
主分类号 |
G02B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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