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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH11186167(A)
申请公布日期
1999.07.09
申请号
JP19970348291
申请日期
1997.12.17
申请人
KOKUSAI ELECTRIC CO LTD
发明人
TAKANO SATOSHI
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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