发明名称 WIRE BONDING DEVICE
摘要 PROBLEM TO BE SOLVED: To surely, detect disconnection even if bonding is performed for a part other than the regular bonding point (the electrode or the lead of a semiconductor) in wire bonding of the semiconductor chip. SOLUTION: A terminal-voltage detecting circuit 7 detects the terminal voltage between a wire 1 and a bonding stage 17 for the led frame making the reference potential point. An AC bridge 5 is a path connecting the wire 1 and a bonding index 17. A balance detecting circuit 6 detects the balance of the AC bridge circuit 5. Thus, the non-connection detecting circuit is constituted, and the non-connection between the wire 1 and the bonding point is detected.
申请公布号 JPH11176868(A) 申请公布日期 1999.07.02
申请号 JP19970363570 申请日期 1997.12.16
申请人 KAIJO CORP 发明人 URA MASANAO;HAYASHIZAKI YOSHIKATSU
分类号 H01L21/60 主分类号 H01L21/60
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