发明名称 METHOD AND DEVICE FOR CHEMICAL TREATMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide an even chemical treatment without generating spotted unevenness due to bubbles and mist by supplying chemical on a material to be treated, and carrying it for the predetermined time while holding the chemical. SOLUTION: A material to be treated is carried on a pass line 6 from left to right, while being treated by chemical. The chemical is supplied from a chemical supplying means 1 so as to form a chemical layer on the material to be treated. The material to be treated is carried while holding the chemical and chemical treatment is performed is carrying. The degradated chemical by treating the material to be treated is replaced with new chemical by a chemical replacing means 3, and chemical treatment of the material to be treated is further proceeded. Then the chemical is eliminated from the material to be treated by a washing shower 4 to finish the chemical treatment of the material to be treated. Finally, a water cutting means 5 such as an air knife squeeze water on the material to be treated to finish all the process of the chemical treatment. Carrying method is selected in response to the shape of the material to be treated, and a method for horizontally holding the material to be treated is desirable.</p>
申请公布号 JPH11174688(A) 申请公布日期 1999.07.02
申请号 JP19970347628 申请日期 1997.12.17
申请人 TORAY IND INC 发明人 YAMADA TOMONORI;GOTO TETSUYA;SUZUKI TETSUO;YOSHIOKA MASAHIRO;KAKINUKI TAKEHIRO;TOMIMATSU SHINJI
分类号 G02B5/20;B05C13/00;G03F7/30;H01L21/027;H01L21/304;(IPC1-7):G03F7/30 主分类号 G02B5/20
代理机构 代理人
主权项
地址