| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a large-scale substrate cassette, wherein supports are each provided with shelf pieces which are accurately provided protruding, the cassette is capable of ensuring an effective space for loading or unloading substrates housing a large number of substrates in it of an irreducible volume. the shelf pieces can be easily elongated in length or set as long as required to restrain the substrates stored in the cassette from being warped with an enlargement of the substrate in size, and the supports themselves are kept free from warpages and high in dimensional accuracy. SOLUTION: This cassette is equipped with a plurality of supports 3, where shelf pieces are provided at regular intervals in a vertical direction protruding for supporting substrates, wherein the supports 3 are provided between an upper frame 1 and a lower frame 2 jointed to from a rectangular parallelopiped box structure, a shelf piece 4 is composed of a metal support pin 17 and a synthetic resin tip cover 18 put on the tip of the support pin 17, the bottoms of the support pins 17 are each fitted into insertion holes 16 bored in the support 3 at regular intervals in a vertical direction, whereby the shelf pieces 4 are provided protruding to the inner side of the support 3.</p> |
