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发明名称
PRECUT METHOD
摘要
申请公布号
JPH11176772(A)
申请公布日期
1999.07.02
申请号
JP19970336011
申请日期
1997.12.05
申请人
DISCO ABRASIVE SYST LTD
发明人
KAMIGAKI MASAYOSHI
分类号
H01L21/301;(IPC1-7):H01L21/301
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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