发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device. SOLUTION: At the time of forming a pair of impurity areas 102 and 103 in an active layer, a comb-line shaped intrinsic or practically intrinsic semiconductor area 104 is formed by a mask. The area 104 is composed of a part effectively functioning as a channel area and the part functioning as a heat sink without forming a channel. That is, by forming the heat sink by the same material as a channel formation area, a heat radiation effect is improved.
申请公布号 JPH11177102(A) 申请公布日期 1999.07.02
申请号 JP19970356237 申请日期 1997.12.08
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 NAKAJIMA SETSUO;FUKUNAGA KENJI
分类号 H01L21/266;H01L21/336;H01L21/77;H01L21/84;H01L23/36;H01L27/12;H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L21/266
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