| 摘要 |
PROBLEM TO BE SOLVED: To provide a drive device of a vibrating actuator, which highly accurately controls speed, acceleration, position and vibration state of the vibrating actuator at high speed. SOLUTION: A computing means 1 for calculating a difference between detection information on a detection means 10 for detecting drive state of the vibrating actuator and a prescribed state, a first integration means 2 for integrating the output value of the operation means 1 at first timing, a second integration means 3 which integrates the output value of the operation means 2 at second timing and the integration value of which is reset whenever integration is executed for a prescribed number of times, a register 5 for holding the integration value of the second integration means 3, which is immediately before resetting, and an addition means 6 adding the output value of the first integration means 2 and the register 5 by a prescribed ratio, are provided. Energy quantity supplied to a piezoelectric element of the vibrating actuator is adjusted, in accordance with output from the addition means 6. |
