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发明名称
Sputteranlage
摘要
申请公布号
DE29901853(U1)
申请公布日期
1999.07.01
申请号
DE19992001853U
申请日期
1999.02.03
申请人
LEYBOLD MATERIALS GMBH, 63450 HANAU, DE
发明人
分类号
C23C14/34;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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