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发明名称
Verfahren und Gerät zur Wahrnehmung einer Ausrichtungsmarke auf einer Halbleiter-Vorrichtung
摘要
申请公布号
DE69033123(D1)
申请公布日期
1999.07.01
申请号
DE19906033123
申请日期
1990.03.03
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
TAKAHASHI, YASUSHI, KAWASAKI-SHI, KANAGAWA 213, JP;YASUDA, HIROSHI, YOKOHAMA-SHI, KANAGAWA 222, JP
分类号
H01L21/027;H01J37/304;(IPC1-7):H01J37/304;H01J37/317
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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