| 摘要 |
PROBLEM TO BE SOLVED: To excellently maintain a function to relax the pressure fluctuation of pure water, in an accumulator for pure water to directly control the pressure of pure water by the pressure of inactive gas not to contaminate pure water. SOLUTION: An accumulator 70 for pure water is provided with a tank 1 communicated with pure water feed pipings 81 and 82 to supply pure water W to an apparatus 90 from a pump 80. A gas introduction port 21, having a valve 11, to inactive gas G to the tank is formed in the upper part of the tank 1. A high water level sensor 43 is provided to detect whether a water level WL of pure water in the tank 1 exceeds an upper limit level UL. |
