| 摘要 |
<p>A spin coating method comprises applying a carbon dioxide liquid to surface portion of a substrate (12); and then rotating the substrate (12) about an axis to distribute the carbon dioxide liquid on the substrate (12). The carbon dioxide liquid can be distributed on the substrate (12) as a carrier, for the purpose of depositing a material such as a coating on the substrate (12). In addition, the carbon dioxide liquid can be distributed on the substrate (12) as a solvent, for the purpose of solubilizing, dissolving or removing a material previously deposited on the surface of the substrate (12). Apparatus (10) for carrying out the present invention is also disclosed.</p> |
