发明名称 METHOD AND DEVICE FOR PRODUCTION OF COMPONENTS FOR MICROFABRICATION
摘要 <p>Atomized particles within a desired size range (e.g.., 1 micron to about 5 microns) are produced from two immiscible fluids, a first fluid source containing the formulation to be atomized, and a second fluid source which is contained in a pressure chamber surrounding at least the area where the first liquid is to be provided. The invention provides methods for: the production of templates for microfabrication, such as particles that serve as templates for self-assembly of monolayers; the creation of small particles to serve as building blocks for the microassembly of objects; and the use of an atomizate to etch configurations and/or patterns onto the surface of an object by removing a selected portion of the surface.</p>
申请公布号 WO1999030835(A1) 申请公布日期 1999.06.24
申请号 IB1998002056 申请日期 1998.12.16
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