| 摘要 |
A specially designed, forceful, compact magnetic micro-mover includes at least one etched single crystal silicon plate having integral springs and stable, low internal stress. A structure of springs which support a rectangular plate are etched in silicon. The plate is driven by planar electromagnetic actuation. The micro-mover consists of a specific etched silicon spring in combination with a planar electromagnetic moving coil actuator that is capable of generating forces greater than 50 mN, while dissipating less than 1 W peak power. The micro-mover also includes a plate suspension system that facilitates the required plate motions and resolution, while preventing changes in plate spacing from effects such as external acceleration, temperature, humidity, and aging; and includes an actuator that appropriately moves the plates in response to electrical signals, such that there is only minimal cross-talk between axes of motion. <IMAGE> |
