| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a treatment equipment provided with a treatment vessel capable of restraining contamination due to microscopic dust in the treatment vessel. SOLUTION: Vacuum bellowses 7 whose support shafts for drive are movable in the shaft direction and which isolate the inside of a treatment vessel from the outside, so as to maintain airtightness of the inside of the treatment vessel are arranged at parts where the support shafts 2A, 2B for driving penetrate the walls of both sides of the treatment vessel 1. Linear guide mechanisms 4 which so retain the support shafts for driving that the support shafts for driving are made to be movable in the shaft direction, and a linear motor 6 for moving the support shafts for driving in the shaft direction are installed. A holding table 10 for holding a substrate is fixed to the support shafts for driving and arranged. Spaces in the vacuum bellowses 7 on both sides of the treatment vessel can be interconnected through communicating tubes 8 which are arranged at positions near the walls of both sides of the treatment vessel.</p> |
