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发明名称
SUBSTRATE TREATMENT EQUIPMENT
摘要
申请公布号
JPH11168078(A)
申请公布日期
1999.06.22
申请号
JP19970333984
申请日期
1997.12.04
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
IZUMI AKIRA;MIYA KATSUHIKO
分类号
B08B3/02;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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