发明名称 CARBON THIN FILM FOR FIELD EMISSION ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a field emission thin film showing characteristic physical property, with high performance, and capable of manufacturing a flat cathode with high efficiency by using a carbon film showing an ultraviolet ray Raman band having a half band width in a specified range in a specific wave number range. SOLUTION: A carbon film 703 deposited on a substrate 701 of a field emission element has a band in the range of 1578-1620 cm<-1> in ultraviolet ray Raman spectrum, and the half band width of 25-165 cm<-1> . The element is formed by coating a conductive layer 702 on the substrate 701, then coating a carbon layer 703 thereon. An anode consists of a substrate 704 made of glass or the like, a conductive layer 705 made of indium oxide or the like, and a fluorescent layer 706 for receiving electrons emitted from the carbon layer 703. Electrons are emitted from the carbon layer 703 by the suitable electric field between the anode and a cathode. The thickness of the carbon film is preferable to be 300 nm or less.
申请公布号 JPH11167859(A) 申请公布日期 1999.06.22
申请号 JP19980262219 申请日期 1998.08.13
申请人 NOMURA BOEKI KK;SI DIAMOND TECHNOL INC 发明人 TOLT ZHIDAN LI;YANIV ZVI
分类号 C01B31/02;B01J19/00;C23C16/26;H01J1/02;H01J1/05;H01J1/30;H01J1/304;H01J29/04;H01J31/12;H01L29/78 主分类号 C01B31/02
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