摘要 |
PROBLEM TO BE SOLVED: To provide a field emission thin film showing characteristic physical property, with high performance, and capable of manufacturing a flat cathode with high efficiency by using a carbon film showing an ultraviolet ray Raman band having a half band width in a specified range in a specific wave number range. SOLUTION: A carbon film 703 deposited on a substrate 701 of a field emission element has a band in the range of 1578-1620 cm<-1> in ultraviolet ray Raman spectrum, and the half band width of 25-165 cm<-1> . The element is formed by coating a conductive layer 702 on the substrate 701, then coating a carbon layer 703 thereon. An anode consists of a substrate 704 made of glass or the like, a conductive layer 705 made of indium oxide or the like, and a fluorescent layer 706 for receiving electrons emitted from the carbon layer 703. Electrons are emitted from the carbon layer 703 by the suitable electric field between the anode and a cathode. The thickness of the carbon film is preferable to be 300 nm or less. |