SCRUBBER CLEANING EQUIPMENT OF WAFER AND CLEANING METHOD,申请号JP19970327897-传众专利搜索

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发明名称	SCRUBBER CLEANING EQUIPMENT OF WAFER AND CLEANING METHOD
摘要
申请公布号	JPH11162898(A)	申请公布日期	1999.06.18
申请号	JP19970327897	申请日期	1997.11.28
申请人	SONY CORP	发明人	KOBAYASHI TETSUYA
分类号	B08B1/04;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B1/04
代理机构		代理人
主权项
地址

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