| 摘要 |
PROBLEM TO BE SOLVED: To surely position an object to be measured and automatically measure the object, by selecting a pattern of the same shape as the object, transferring the object to an inspection position, picking up an image of the object, measuring and inspecting a size from the picked image of the object on the basis of teaching data of the selected pattern. SOLUTION: This apparatus comprises a positioning table 1, a first and a second cameras 11, 12, a control device, etc. When a blade 100 is loaded and positioned on the positioning table 1, the positioning table 1 is transferred to an inspection position in an inspection station 5 by driving of an X-axis motor. The first camera 11 is set to be movable in a direction orthogonal to a movement direction of the positioning table 1 on the same plane, and the second camera 12 is set to be movable in an up-down direction. The control device has an NC control part 40 controlling movements of the positioning table 1, cameras 11, 12 and stages of the cameras 11, 12, an image-processing part 50 processing picked image signals, a controller 60 inspecting a size and executing a visual inspection, etc. |
