PROBE FOR SCANNING PROBE MICROSCOPE AND METHOD FOR DETECTING FORCE,申请号JP19970344143-传众专利搜索

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发明名称	PROBE FOR SCANNING PROBE MICROSCOPE AND METHOD FOR DETECTING FORCE
摘要
申请公布号	JPH11160334(A)	申请公布日期	1999.06.18
申请号	JP19970344143	申请日期	1997.11.28
申请人	NIKON CORP	发明人	NAKANO KATSUSHI
分类号	G01B21/30;G01N37/00;G01Q60/32;G01Q60/38;G01R33/10;H01L41/08;(IPC1-7):G01N37/00	主分类号	G01B21/30
代理机构		代理人
主权项
地址

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