| 摘要 |
PROBLEM TO BE SOLVED: To avoid re-work process of washing process for more efficient process, by recognizing a process end time from the process time at a diffusion device for retrieval of rot of washing process, and transporting a semiconductor device from a washing device to the diffusion device. SOLUTION: A file management part constitutes and manages a file wherein a time lag between a washing device 3 and a diffusion device 3 is calculated. Then, the state of the diffusion device 2 is analyzed, and if it is vacant, diffusion process is retrieved for checking whether the diffusion device 2 and recipe match or not, and if they match, presence of an express flat is examined, and shipping command is sent to a stock management controller 5 through a communication part. Upon receiving information about shipping completion, a main control part instruct a management controller 6 to transport a lot through the communication part. Then, a transportation device sends the same information to the management controller 6 and the main control part about completion of lot transportation. Then, the main control part updates process start date/time of a diffusion device table and location of lot table in a storage device 14 comprising database. |
