Elektrophoretische Abscheidung dünner Zirkonoxid-Filme

摘要

A method for manufacturing a thin zirconia film comprises the steps: (a) preparing a suspension in which partially-stabilized or stabilized zirconia particles having electric charges are dispersed in a solvent; (b) positioning a pair of electrodes in the suspension; (c) applying an electric field between the electrodes, said zirconia particles moving to the electrode and said zirconia particles being deposited on the electrode electrochemically; and (d) sintering the zirconia film to form a partially-stabilized or stabilized thin zirconia film.