| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus in which the concentration of a hydrogen peroxide vapor supplied into a treatment container can be detected in real time and precisely and in which a treatment by the hydrogen peroxide vapor such as a sterilization treatment, a disinfection treatment or the like can be executed with good efficiency and effectively. SOLUTION: In a treatment system, an object 1 to be treated is brought into contact with a hydrogen peroxide vapor 3 inside a treatment container 2 whose pressure is held to be constant. In the treatment system, the concentration of the hydrogen peroxide vapor 3 inside the treatment container 2 is detected by a semiconductor gas sensor 71. The output of the semiconductor gas sensor 71 is corrected and computed by a computing unit 74c in the relationship between a humidity value and a temperature value, inside the treatment container 2, which are detected by a detector 72 and a detector 73 on the basis of correlation data between the output of the semiconductor gas sensor 71 and the concentration of the hydrogen peroxide vapor 3 while the temperature value and the humidity value which are found in advance are used as parameters. Its computed value is displayed on a concentration display 75 as the concentration of the hydrogen peroxide vapor 3. |
