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发明名称
CVD APPARATUS
摘要
申请公布号
KR200143432(Y1)
申请公布日期
1999.06.15
申请号
KR19960004282U
申请日期
1996.03.08
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
LEE, HEE-MYUNG
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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