MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICES,申请号KR19950034439U-传众专利搜索

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发明名称	MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICES
摘要
申请公布号	KR200143430(Y1)	申请公布日期	1999.06.15
申请号	KR19950034439U	申请日期	1995.11.20
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	NAM, JUNG-RIM;LEE, CHANG-HWAN
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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