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发明名称
GERÄT UND VERFAHREN ZUM AUFBRINGEN DURCH ZERSTÄUBUNG EINES FILMES AUF EINEN SUBSTRAT
摘要
申请公布号
AT180923(T)
申请公布日期
1999.06.15
申请号
AT19950309064T
申请日期
1995.12.13
申请人
APPLIED MATERIALS, INC.
发明人
TEPMAN, AVI
分类号
C23C14/34;H01J37/34;H01L21/203;H01L21/285;(IPC1-7):H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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