| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily adjust a beam spot interval, and carry out the processing at high speed by an inexpensive, small, and light device. SOLUTION: The plural number of laser beams L1 and the like ejected from a semiconductor laser are made to be the plural number of beams with different angles through a lens 7 and a lens 8, which are optical axial angle adjusting means. These beams are respectively reflected by an X mirror 9 and a Y mirror 10 being driven by a galvano scanner, enter a fθlens 19a as a laser beam L1a and the like, and are condensed at a beam spot position P1 and the like on a workpiece 20 being put at a focal position of the fθlens 19a, so as to process the workpiece 20. The beam spot position P1 and the like are scanned by the two above-mentioned mirrors, and the distance between the beam spots is adjusted by the angle between the beams.</p> |
