| 摘要 |
<p>A monolithic angular velocity sensor (10) is formed from a common planar silicon substrate. The sensor (12) comprises an elongated beam (12) suspended within framed aperture (14) formed within the common substrate. Transverse members (18,18',20,20') or ears, secure the elongated beam (12) to the frame and to the nodal points of the beam (12). Both single beam (12) and multiple beam array sensors (10) may be formed within a common silicon substrate. Orthogonally-directed beams (12) or arrays of beams, formed with a common substrate, permit angular velocity measurements about two orthogonal axes. <IMAGE></p> |
