| 摘要 |
PROBLEM TO BE SOLVED: To obtain a magnetic film having uniform film thickness, minimal in drop out and excellent in electromagnetic conversion characteristic and corrosion resistance, by constituting a vessel for melting and evaporating materials by using a ceramic sintered compact having specific degree of sintering. SOLUTION: The degree of sintering of a vessel is >=80%. It is preferable that the vessel is constituted of a sintered compact having >=95% purity. It is preferable that the vessel is constituted of the sintered compact composed of MyO (where M means metallic element and y=0.6 to 1.1 is satisfied) and having >=80% degree of sintering and has 1-5 mm wall thickness. The inside of a vacuum tank 10 is evacuated, and a base material 3 is allowed to travel from a supply-side roll 2a along a cooling can roll 1 and coiled around a coiling- side roll 2b. A magnetic metal 6 in a crucible 5 is irradiated with an electron beam from an electron gun 7, and grains of the resultant evaporated magnetic metal 6 are vapor-deposited on the traveling base material 3. The overall thickness of the resultant magnetic film formed is 0.1-0.2μm, and carbon, boron carbide, etc., are provided as a protective film. As the base material 3, a resin such as polyethylene terephthalate is used.
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