发明名称 |
Method of fabricating and patterning oleds |
摘要 |
A patterning system (22) with a photoresist overhang (24a) allows material to be deposited onto a substrate (20) in various positions by varying the angle from which the material is deposited, and by rotating the substrate. The patterning system can be used to fabricate a stack of organic light emitting devices on a substrate using the same patterning system and without removing the substrate from vacuum. |
申请公布号 |
AU1608899(A) |
申请公布日期 |
1999.06.15 |
申请号 |
AU19990016088 |
申请日期 |
1998.11.23 |
申请人 |
THE TRUSTEES OF PRINCETON UNIVERSITY |
发明人 |
STEPHEN R. FORREST;PAUL BURROWS;PFEIFANY TIAN;VLADIMIR BULOVIC |
分类号 |
H01L27/32;H01L51/00;H01L51/40;H01L51/50 |
主分类号 |
H01L27/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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