发明名称 Method of fabricating and patterning oleds
摘要 A patterning system (22) with a photoresist overhang (24a) allows material to be deposited onto a substrate (20) in various positions by varying the angle from which the material is deposited, and by rotating the substrate. The patterning system can be used to fabricate a stack of organic light emitting devices on a substrate using the same patterning system and without removing the substrate from vacuum.
申请公布号 AU1608899(A) 申请公布日期 1999.06.15
申请号 AU19990016088 申请日期 1998.11.23
申请人 THE TRUSTEES OF PRINCETON UNIVERSITY 发明人 STEPHEN R. FORREST;PAUL BURROWS;PFEIFANY TIAN;VLADIMIR BULOVIC
分类号 H01L27/32;H01L51/00;H01L51/40;H01L51/50 主分类号 H01L27/32
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