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发明名称
摘要
申请公布号
JP2900941(B2)
申请公布日期
1999.06.02
申请号
JP19890054998
申请日期
1989.03.09
申请人
FUJITSU KK
发明人
YAMAZAKI HIROKAZU;AKAOGI TAKAO;YOSHIDA MASANOBU
分类号
G01R31/26;G01R31/28;G01R31/3185;G11C11/401;G11C29/00;G11C29/12;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/318
主分类号
G01R31/26
代理机构
代理人
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