| 摘要 |
PURPOSE:To enable inspection operation to be performed easily and prevent erroneous designation from occurring by picking up an image of a model of a pattern to be inspected before inspection process and generating a reference data and then comparing a measurement data of the inspection pattern to be inspected with a reference data in an inspection process for performing discrimination of the pattern to be inspected. CONSTITUTION:A transport belt 1 is driven in a direction of arrow a by a drive mechanism, drive is stopped every time a product to be inspected 2 reaches an inspection position P, drive is restarted after inspection ends, and then the next product to be inspected 2 is led to the position P. A model of a product to be inspected 2' is placed on a table 3 for performing process but, for example, the model 2' may be placed at the position P on the belt 1 and teaching process may be executed. Then, an image processing device 5 includes a microcomputer etc., binary coding processing etc., may be performed for an image which is obtained by picking up an image of a pattern 7 of the product to be inspected 2 by a processing device 4, thus discriminating whether the pattern 7 is the prescribed one or not. |
