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发明名称
WET TREATMENT VESSEL AND LIQUID FEEDING METHOD THEREFOR
摘要
申请公布号
JPH11150091(A)
申请公布日期
1999.06.02
申请号
JP19970330830
申请日期
1997.11.17
申请人
NEC CORP
发明人
KAWAGUCHI HIDEHIKO
分类号
B08B3/10;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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