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发明名称
ETCHING METHOD FOR POLYSILICON FILM
摘要
申请公布号
KR100190498(B1)
申请公布日期
1999.06.01
申请号
KR19960011119
申请日期
1996.04.13
申请人
MATSUSHITA ELECTRONICS CORPORATION
发明人
MIYAMOTO, KYOKO;MAKAGAWA, SATOSHI
分类号
H05H1/46;C23F4/00;H01L21/302;H01L21/3065;H01L21/3213;H01L29/78;(IPC1-7):G03F7/26
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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