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发明名称
CLEANING APPARATUS
摘要
申请公布号
KR100187920(B1)
申请公布日期
1999.06.01
申请号
KR19930002709
申请日期
1993.02.25
申请人
TOKYO ELECTRON KYUSHU LIMITED;TOKYO ELECTRON LIMITED
发明人
MIYAZAKI, DAKANORY;SAKURAI, HIROSY
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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