A RING FOR GAS SEALING IN THE WAFER COOLING SYSTEM,申请号KR19960021363-传众专利搜索

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发明名称	A RING FOR GAS SEALING IN THE WAFER COOLING SYSTEM
摘要
申请公布号	KR100190281(B1)	申请公布日期	1999.06.01
申请号	KR19960021363	申请日期	1996.06.14
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	GO, WOONG;JUNG, YUN-HAE;OH, JAE-YOUNG;PARK, JIN-HO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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