发明名称 ELECTRO-OPTICAL PROBE
摘要 <p>PROBLEM TO BE SOLVED: To provide an electro-optical probe capable of accurately measuring a voltage and a field. SOLUTION: When a field is measured, a top end block 30b is used which comprises an electro-optical element 38 which transmit a laser beam for measurement inputted from a first end face and a reflector 39 which is formed on a second end face side opposed to the first end face and reflects the laser beam for measurement and which outputs the reflected light in which polarization condition is varied according to the strength of a given field. Also, when a voltage is measured, a top end block 30a is used which comprises the electro- optical element 38 which transmit a laser beam for measurement inputted from the first end face, the reflector 39 which is formed on the second end face side opposed to the first end face and reflects the laser beam for measurement, and a sharp tip electrode 40 installed on the second end face side and which outputs the reflected light in which polarization condition is varied according to the strength of a given field formed by the electrode 40.</p>
申请公布号 JPH11142486(A) 申请公布日期 1999.05.28
申请号 JP19970308896 申请日期 1997.11.11
申请人 ANDO ELECTRIC CO LTD;NIPPON TELEGR & TELEPH CORP <NTT> 发明人 TAKEUCHI NOBUNARI;YANAGISAWA KOJU;KIKUCHI JUN;BANJIYOU CHIYOUICHI;ENDO YOSHIO;SHINAGAWA MITSURU;NAGATSUMA TADAO;MATSUHIRO KAZUYOSHI
分类号 G01R15/24;G01R19/00;G01R29/12;G01R31/302;H01L21/66;(IPC1-7):G01R31/302 主分类号 G01R15/24
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