SEMICONDUCTOR ALIGNER SYSTEM, SEMICONDUCTOR ALIGNER AND DEVICE MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To efficiently use many latest data files, while suppressing a load on a storage capacity as much as possible in a semiconductor aligner. SOLUTION: A semiconductor aligner system is provided by making a network by connecting a server 105 with semiconductor aligners 1021-1023 with a network connecting means 103. The server 105 transmits data files required for processing by the semiconductor aligners 1021-1023 to the semiconductor aligners 1021-1023 upon a request from the semiconductor aligners. The semiconductor aligners 1021-1023 request the server 105 of data file transfer on demand (as needed), when a certain data tile is required in their alignment operation. The server 105 operates to transfer data any time upon a request from the semiconductor aligners 1021-1023.