| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sealed substrate cassette which is of a sealed type for avoiding deposing of floating dust, etc., to a substrate housed inside, has a cover opening mechanism which can be manufactured simply and inexpensively and a good sealing property, and avoids producing dust due to rubbing of the cover, when opened/closed or depositing it to the substrate if it is produced a little. SOLUTION: A cassette comprises a parallelepiped body 1 having pairs of support members 4 opposed inside with rack pieces 8 projecting with specified spacing to form hold grooves 9 and cover 2 slidably openable which hermetically closes the opening of the body when closing, vertical slide rails 5 at the outer faces of both side plates 11 of the body 1 near the opening for guiding the cover from an open state to a close state, slide members 6 at the inner faces of the slide plates 13 extending back to at both the sides of a surface plate 12 of the cover, and a packing 7 at one of contacted portions of the cover and body, when the cover closes the opening.</p> |
