| 摘要 |
PROBLEM TO BE SOLVED: To ensure a sufficient glass strength of a solar cell module and reduce a warp ages sufficinty, by specifying a heating time, max. temp. and in-plane temp. distribution of a glass substrate before being quenched during heat treating in a step of strengthening the glass substrate which has specified liner expansion coefficient. SOLUTION: A glass (TCO) substrate 4 for solar cells is composed of a base glass plate 1, made from soda lime silicate glass or the like, alkali barrier layer 2 formed on the plate 1 and transparent conductive (TCO) film laminated thereon. On the TCO film 3 of the substrate 4, a p, i and n-type three amorphous Si element layers 7 are laminated with an Al electrode layer 6 formed thereon. The used glass plate has a linear expansion coefficient of 30×10<-7> K<-1> or more, the heating time up to the strengthening temp. is 150 sec or less, max. temp. of the glass plate immediately prior to quenched is 610-630 deg.C, and the in-plane temp. distribution of the plate is within 30 deg.C. |
