DEVELOPING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide developing equipment which performs uniform development process. SOLUTION: A nozzle main body part 16 of a developer injecting nozzle 11 has a flat bottom plane 17 and is formed of a relatively hard hydrophilic material. The nozzle main body part 16 is provided with a slit-shaped injecting outlet 15 that extends downward in the vertical direction and opens at the bottom plane 17. A region on the front side from the slit-shaped injecting outlet 15 at the bottom plane 17 of the nozzle main body part 16 and an external wall plane 18 on the front side are coated with a water repellent material layer 20. The slit-shaped injecting outlet 15 is provided on the front side from the center of the bottom plane 17 in the scanning direction A of the developer injecting nozzle 11. A substrate is held by a substrate holding part in the stationary status at the time of being processed. The developer is supplied on the substrate while the developer injecting nozzle 11 is linearly passing over the substrate from a position on one external side of the substrate to the other external side of the substrate.