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发明名称
BONDING PRESSURE UNIT
摘要
申请公布号
JPH11145164(A)
申请公布日期
1999.05.28
申请号
JP19970307142
申请日期
1997.11.10
申请人
SONY CORP
发明人
NAKAJIMA AKIHIKO
分类号
H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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