Fluorine barrier layer between conductor and insulator for degradation prevention,申请号SG19970003669-传众专利搜索

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发明名称	Fluorine barrier layer between conductor and insulator for degradation prevention
摘要
申请公布号	SG65024(A1)	申请公布日期	1999.05.25
申请号	SG19970003669	申请日期	1997.10.06
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	COONEY, EDWARD C., III;LEE, HYUN, K.;MCDEVITT, THOMAS, L.;STAMPER, ANTHONY, K.
分类号	H01L21/285;H01L21/314;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/56	主分类号	H01L21/285
代理机构		代理人
主权项
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