FORMATION OF METALLIC FLUORIDE-CONTAINING COATING,申请号JP19970307476-传众专利搜索

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发明名称	FORMATION OF METALLIC FLUORIDE-CONTAINING COATING
摘要
申请公布号	JPH11140617(A)	申请公布日期	1999.05.25
申请号	JP19970307476	申请日期	1997.11.10
申请人	NIKON CORP	发明人	MATSUNARI SHUICHI
分类号	C23C8/08;C23C14/06;(IPC1-7):C23C8/08	主分类号	C23C8/08
代理机构		代理人
主权项
地址

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