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发明名称
PLASMA TREATING DEVICE
摘要
申请公布号
JPH11140655(A)
申请公布日期
1999.05.25
申请号
JP19970313344
申请日期
1997.11.14
申请人
SONY CORP
发明人
KUBOTA SHINJI
分类号
C23C16/50;H01L21/205;H01L21/302;H01L21/3065;H01S3/00;(IPC1-7):C23C16/50;H01L21/306
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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