DEVICE AND METHOD FOR MEASURING ELECTRICAL CHARACTERISTICS,申请号JP19970296945-传众专利搜索

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发明名称	DEVICE AND METHOD FOR MEASURING ELECTRICAL CHARACTERISTICS
摘要
申请公布号	JPH11133075(A)	申请公布日期	1999.05.21
申请号	JP19970296945	申请日期	1997.10.29
申请人	NEC KYUSHU LTD	发明人	IGARI TETSUYA
分类号	G01R27/02;G01R1/06;G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R27/02	主分类号	G01R27/02
代理机构		代理人
主权项
地址

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