| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify cleaning work for a probe needle for a probe card, and to improve work environment by eliminating a process of using organic solvent in the cleaning work for the probe needle. SOLUTION: In a cleaning device for a probe needle for a probe card, a polishing member 2 for the probe needle is provided with a first and a second fiber members 1 comprising at least one selected from a group comprising fiber metal, fiber carbon, and fiber ceramic. The first and the second fiber members 1 are disposed to be extended in different directions from each other, and they have a range where they are fixed to each other. On a surface of the polishing member 2, cavities of a roughly similar width to a width of a tip part 12 of the probe needle 11 is formed.</p> |
